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4시 20분부터 제1과학관 31214 e+강의실에서 간단한 다과를 제공합니다.


아 래



Title: Single crystal growth of metal film and metal oxide film on different substrates and their various applications


Speaker: 정   세   영  교수님 (부산대학교)


Date & Time: May. 16. (Wed.) 2018 4:30 PM


Place: Natural Science 1,  Room No. 31214


Abstract: Copper thin films have been widely used as electrodes and interconnection wires in integrated electronic circuits, and more recently as substrates for the synthesis of graphene. However, many of the potential applications in the industries are limited by the serious oxidation and thus the deterioration of the conductivity. The ultra-high vacuum system required for high-quality Cu film fabrication, such as molecular beam epitaxy (MBE) and the limited size of the film cause the cost rise, which leads people to seek new materials. In this work, we demonstrate the growth and its mechanism of grain-free wafer-scale Cu thin films using a modified sputtering technique, not using MBE or ALD. Despite the low vacuum condition of 10-3 Pa, the resulting thin film was oxygen free. The Cu thin film is perfectly epitaxially grown on an Al2O3 (0001) substrate, but also shows high quality on polymer substrates such as PI, PC, PET and PDMS, which enables to apply to the region of flexible, stretchable and transparent devices. Moreover, the deposited film has much higher adhesion force than poly crystalline copper films. We applied the single crystal thin film to the flexible transparent conducting electrodes by making a micromesh/nanomesh structure using UV lithography and wet etching. The important advantage of the single crystal copper film is due to the natural oxide layer with a thickness of around 2nm, which protects further oxidation, so that the copper layer maintains clean even for 2-3 years without any capping layer. Another breakthrough application is the growth of Cu2O and CuO from the single crystal copper thin film, which are transparent and have p-type semiconducting property. Moreover, the color of the copper film can be controlled between transparent yellow and violet, between opaque gold and opaque metallic scarlet. In this presentation, I’d like to introduce also the growth of metal thin films such as copper and silver on various substrates such as sapphire, silicon and polymer and how we control oxidation of copper systematically.

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