logo

korean english

게시판

Home > 게시판 > 세미나

아래와 같이 콜로퀴움을 개최하오니 많이 참석해 주시기 바랍니다.

4시 20분부터 제1과학관 31214 e+강의실에서 다과를 준비하오니 많은 참석 부탁드립니다.


아 래


Title: 초고속반도체의 블랙다이아몬드™,low-k


Speaker: 정   동   근  교수님 (성균관대학교 물리학과)


Date & Time: March. 16(Wed.) 2016, 4:30 PM


Place: Natural Science 1,  Room No. 31214


Abstract: Ultra-large-scale integration devices, which contain metallization and interlayer dielectric films, have continuously been shrunk in order to improve their performance. However, as a result of this reduction in size, packing density has also increased. Thus, resistance-capacitance delays have become an enormous issue, limiting the true capacity of these otherwise more efficient devices. In order to address this issue, copper (Cu) damascene interconnects with low relative dielectric constant (low-k; k ≤ 3.0) films have been replacing the conventional Al/SiO2 interconnection structure. The various low-k films ranging from fluorine (F)-doped materials to SiCOH films are being utilized. In particular, SiOCH films have become the leading candidate for the fabrication of next generation integrated circuits.

번호 제목 날짜 조회 수
공지 <12/8(Thu.) 11:00am>노벨상 소개 강연 - 2016년 노벨 물리학상: 위상 응집 물리의 탄생 2016.11.28 1058801
462 <April. 27(Wed.) 4:30 PM> 로봇과 함께 살아갈 미래 2016.04.22 54194
461 <4/6(Wed.) 1pm> Results from DM-Ice17 2016.04.05 78116
460 <April. 6(Wed.) 4:30 PM> Quantitative Determination of High Tc Superconductivity Mechanism 2016.03.31 128298
459 <March. 30(Wed.) 4:30 PM> Tetraneutron (four-neutron nucleus) 2016.03.24 68668
458 <March.24(Thu) 14:00> A new boson and muon g-2 2016.03.17 65158
457 <March. 23(Wed.) 4:30 PM> 조선시대의 천문시계 2016.03.17 56688
456 <March.18(Fri) 11:00> High Pressure Synthesis and Characterization of Non-Oxide Superconductors 2016.03.14 67523
» <March. 16(Wed.) 4:30 PM> 초고속반도체의 블랙다이아몬드™,low-k 2016.03.10 72448
454 <March. 9(Wed.) 4:30 PM>가치 있는 대학 생활이란 무엇인가? file 2016.03.07 55613
453 <March 8(Tue) 18:00> Unsolved puzzles of Gamma-Ray Bursts 2016.03.03 67757
452 2016학년도 1학기 콜로퀴움 일정 2016.02.03 133094
451 <Dec.30(Wed) 16:30> Some basics about the thermoelectricity; the semi-classical Boltzmann transport approach 2015.12.24 66844
450 <Dec. 9(Wed.) 4:30 PM>Direct detection of dark matter at Underground 2015.12.03 73829
449 <Dec. 2(Wed.) 4:30 PM> Next-generation solar cells for high photo-conversion efficiency 2015.11.25 96235
448 <Nov. 25(Wed.) 4:30 PM> Present and Future of OLED 2015.11.19 73741
447 <Nov. 18(Wed.) 4:30 PM> Single-molecule chemistry and spectroscopy on ultrathin insulating films 2015.11.11 178175
446 <Nov. 11(Wed.) 4:30 PM> 그래핀 산업의 현황과 전망 2015.11.09 62617
445 <Nov.13(Fri) 16:00> Kondo screening in mixed valence and heavy fermion compounds and the signatures of Nozieres’ exhaustion 2015.11.04 121542
444 <Nov. 4(Wed.) 4:30 PM> 기능성 산화물과 그래핀을 접합한 나노소자의 특성 변화 2015.10.30 60099
443 <Oct.20(Tue) 10:00-12:00> Novel quantum transport in Weyl semimetals and double-Weyl semimetals 2015.10.23 83954