logo

korean english

게시판

Home > 게시판 > 세미나

아래와 같이 콜로퀴움을 개최하오니 많이 참석해 주시기 바랍니다.

4시 20분부터 제1과학관 31214 e+강의실에서 다과를 준비하오니 많은 참석 부탁드립니다.


아 래


Title: 초고속반도체의 블랙다이아몬드™,low-k


Speaker: 정   동   근  교수님 (성균관대학교 물리학과)


Date & Time: March. 16(Wed.) 2016, 4:30 PM


Place: Natural Science 1,  Room No. 31214


Abstract: Ultra-large-scale integration devices, which contain metallization and interlayer dielectric films, have continuously been shrunk in order to improve their performance. However, as a result of this reduction in size, packing density has also increased. Thus, resistance-capacitance delays have become an enormous issue, limiting the true capacity of these otherwise more efficient devices. In order to address this issue, copper (Cu) damascene interconnects with low relative dielectric constant (low-k; k ≤ 3.0) films have been replacing the conventional Al/SiO2 interconnection structure. The various low-k films ranging from fluorine (F)-doped materials to SiCOH films are being utilized. In particular, SiOCH films have become the leading candidate for the fabrication of next generation integrated circuits.

번호 제목 날짜 조회 수
공지 <12/8(Thu.) 11:00am>노벨상 소개 강연 - 2016년 노벨 물리학상: 위상 응집 물리의 탄생 2016.11.28 1090975
256 <June 8(Wed.) 4:30 PM> 세계와 우리나라 우주개발 도전 2016.06.01 55882
255 <June 1(Wed.) 4:30 PM> 중력으로 강한 핵력 이해하기 2016.05.26 54394
254 <May. 25(Wed.) 4:30 PM> Functional Materials @ Nanoscale: Electronics, Energy and ‘Green’Healthcare Applications 2016.05.23 196492
253 <May. 18(Wed.) 4:30 PM> Search for Hidden Neutrinos at the High Energy Frontier 2016.05.23 54707
252 <May. 11(Wed.) 4:30 PM> In-situ x-ray studies of functional oxides for energy systems 2016.05.23 69694
251 <May. 4(Wed.) 4:30 PM> 플라즈마를 이용한 표면처리 기술 2016.04.27 54959
250 <April. 27(Wed.) 4:30 PM> 로봇과 함께 살아갈 미래 2016.04.22 55108
249 <April. 6(Wed.) 4:30 PM> Quantitative Determination of High Tc Superconductivity Mechanism 2016.03.31 154944
248 <March. 30(Wed.) 4:30 PM> Tetraneutron (four-neutron nucleus) 2016.03.24 72559
247 <March. 23(Wed.) 4:30 PM> 조선시대의 천문시계 2016.03.17 57744
» <March. 16(Wed.) 4:30 PM> 초고속반도체의 블랙다이아몬드™,low-k 2016.03.10 75646
245 <March. 9(Wed.) 4:30 PM>가치 있는 대학 생활이란 무엇인가? file 2016.03.07 56661
244 2016학년도 1학기 콜로퀴움 일정 2016.02.03 134263
243 <Dec. 9(Wed.) 4:30 PM>Direct detection of dark matter at Underground 2015.12.03 77154
242 <Dec. 2(Wed.) 4:30 PM> Next-generation solar cells for high photo-conversion efficiency 2015.11.25 108219
241 <Nov. 25(Wed.) 4:30 PM> Present and Future of OLED 2015.11.19 76064
240 <Nov. 18(Wed.) 4:30 PM> Single-molecule chemistry and spectroscopy on ultrathin insulating films 2015.11.11 188489
239 <Nov. 11(Wed.) 4:30 PM> 그래핀 산업의 현황과 전망 2015.11.09 63603
238 <Nov. 4(Wed.) 4:30 PM> 기능성 산화물과 그래핀을 접합한 나노소자의 특성 변화 2015.10.30 61156
237 <Oct. 28(Wed.) 4:30 PM> Anomalous diffusion of single-molecules in living cells: at the interface of biology and statistical physics 2015.10.19 117873