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아래와 같이 콜로퀴움을 개최하오니 많이 참석해 주시기 바랍니다.

4시 20분부터 제1과학관 31214 e+강의실에서 다과를 준비하오니 많은 참석 부탁드립니다.


아 래


Title: 초고속반도체의 블랙다이아몬드™,low-k


Speaker: 정   동   근  교수님 (성균관대학교 물리학과)


Date & Time: March. 16(Wed.) 2016, 4:30 PM


Place: Natural Science 1,  Room No. 31214


Abstract: Ultra-large-scale integration devices, which contain metallization and interlayer dielectric films, have continuously been shrunk in order to improve their performance. However, as a result of this reduction in size, packing density has also increased. Thus, resistance-capacitance delays have become an enormous issue, limiting the true capacity of these otherwise more efficient devices. In order to address this issue, copper (Cu) damascene interconnects with low relative dielectric constant (low-k; k ≤ 3.0) films have been replacing the conventional Al/SiO2 interconnection structure. The various low-k films ranging from fluorine (F)-doped materials to SiCOH films are being utilized. In particular, SiOCH films have become the leading candidate for the fabrication of next generation integrated circuits.

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