logo

korean english

게시판

Home > 게시판 > 세미나

아래와 같이 콜로퀴움을 개최하오니 많이 참석해 주시기 바랍니다.

4시 20분부터 제1과학관 31214 e+강의실에서 다과를 준비하오니 많은 참석 부탁드립니다.


아 래


Title: 초고속반도체의 블랙다이아몬드™,low-k


Speaker: 정   동   근  교수님 (성균관대학교 물리학과)


Date & Time: March. 16(Wed.) 2016, 4:30 PM


Place: Natural Science 1,  Room No. 31214


Abstract: Ultra-large-scale integration devices, which contain metallization and interlayer dielectric films, have continuously been shrunk in order to improve their performance. However, as a result of this reduction in size, packing density has also increased. Thus, resistance-capacitance delays have become an enormous issue, limiting the true capacity of these otherwise more efficient devices. In order to address this issue, copper (Cu) damascene interconnects with low relative dielectric constant (low-k; k ≤ 3.0) films have been replacing the conventional Al/SiO2 interconnection structure. The various low-k films ranging from fluorine (F)-doped materials to SiCOH films are being utilized. In particular, SiOCH films have become the leading candidate for the fabrication of next generation integrated circuits.

번호 제목 날짜 조회 수
공지 <12/8(Thu.) 11:00am>노벨상 소개 강연 - 2016년 노벨 물리학상: 위상 응집 물리의 탄생 2016.11.28 1088693
256 <1/16> Higgs-to-diphoton rate in type II seesaw models 2013.01.11 76842
255 <11/14> 한방의료기기에서 나노소자의 활용 2008.11.11 76786
254 <4/7> Structure and Dynamics of Complex Networks 2006.04.03 76678
253 <12/17(Tue.)> Nuclear spectroscopy with low energy reaction thermal neutrons in ILL 2019.12.17 76650
252 <4/6> Observation of Reactor Electron Antineutrino Disappearance in the RENO Experiment 2012.04.04 76625
251 <Nov.20(Wed.)>At the End of Space and Time: Imaging the Black Hole in M 87 2019.11.14 76452
250 <10/28> Magneto-electric response of multiferroic chiral magnets 2013.10.21 76267
249 <3/28> Nanoscale Physics related to Resistance Switchings &Its Applications to Resistance RAM 2008.03.24 76175
248 <12/12> 나노물리학과 컴퓨터 시뮬레이션 2008.12.08 76071
247 <9/7> On Dark Matter and its indirect detection with box-shaped gamma-rays 2012.09.05 75905
246 <3/19> 고자기장 하에서 반도체 양자구조의 광전이 특성 2014.03.13 75894
245 <Nov. 25(Wed.) 4:30 PM> Present and Future of OLED 2015.11.19 75886
244 <12/21>나노 광전소자 2006.12.31 75758
243 <6/3(수) 오후4:30분> The Quest for Dark Matter: Discovering Its Nature Underground? 2015.05.28 75662
242 <6/15(Fri.) ~ 16(Sat.)> Formation of first star and galaxy, Gravitational waves from Binary Mergers of Sub-Solar Mass Dark Black Holes 2018.06.12 75563
241 <3/30> Extreme Energy, Extreme Universe (Search for Ultra High Energy Particles in Space) 2007.03.26 75450
240 <May.15(Wed.)> Three-body problems and three-body forces in Classic and Quantum Systems 2019.05.08 75367
239 <9/22(Thu.) 10:30> Bulk-boundary correspondence from the inter-cellular Zak phase 2016.08.29 75291
» <March. 16(Wed.) 4:30 PM> 초고속반도체의 블랙다이아몬드™,low-k 2016.03.10 75207
237 THINKING PHYSICS 발표회 2009.03.16 75142